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illumination h.line
illum.filter circle sigma=0.5
layout x.low=-0.5 z.low=-1.0 x.high=0.5 z.high=1.0
projection na=0.45
pupil.filter circle
image win.x.lo=-1.0 win.x.hi=1.0 win.z.lo=-1.25 win.z.hi=1.25 dx=0.05
structure outfile=lithography_1.str mask
line x loc=-1.0 spacing=0.01
line x loc=1.0 spacing=0.01
line y loc=0.0 spacing=0.01
line y loc=1.0 spacing=0.01
initialize silicon orientation=111 two.d
deposit oxide thick=0.1 div=10
deposit name.resist=AZ1350J thickness=0.5 div=10
expose dose=150
bake time=100 sec temp=120
develop mack time=90 steps=30
material material=AZ1350J gamma.reflo=2e2 reflow visc.0=1.862e-13 visc.E=1.85
bake time=10 min temp=120 reflow
structure outfile=lithography_2.str
tonyplot -st lithography_2.str
quit
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